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Efficient CO₂ liquefaction for industrial applications

CO₂ liquefaction is an essential process in various branches of industry, particularly in the semiconductor industry, where liquid CO₂ is used for residue-free cleaning of devices and equipment. As carbon dioxide (CO₂) is gaseous under normal conditions, it must be converted into a liquid state by increasing the pressure and/or cooling it down.

The process begins with the compression of the CO₂ in a metal diaphragm compressor, which pressurises the gas to a high level. The compressed, partially supercritical CO₂ is then passed through a cooler, which cools it down to the condensation point. The subsequent expansion in a nozzle produces CO₂ snow, which is ideal for absolutely residue-free cleaning.

The metal diaphragm compressors from sera HYDROGEN are the perfect solution for this, as they ensure particle-free and oil-free compression - a basic requirement for the purity of the CO₂. They also impress with their energy efficiency, reliability and easy maintenance, making them the preferred choice for industrial processes with high availability requirements.

Products used

Discover which products are used in the field of CO2 liquefaction

Advantages

  • Energy efficient

    Thanks to energy-efficient technology, you can reduce operating costs and protect the environment at the same time.

  • Reliable

    Maximum reliability for industrial processes with continuous operation and high availability.

  • Oil-free compression

    The oil-free compression guarantees maximum purity - ideal for sensitive CO₂ applications.

Industries

  • Semiconductor technology

    to the industry

Our range of services

  • Installation & commissioning
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  • Technical advice & support
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  • Repairs & general overhaul
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  • Worldwide maintenance & services
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  • Compressor training
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  • Spare parts service & component supply
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