Semiconductor industry

Semiconductor industry - Precise gas compression for the highest purity requirements

The semiconductor industry places the highest demands on purity and precision in gas conveyance and compression. Even the smallest impurities can impair the quality of semiconductor components. This is where sera HYDROGEN's metal diaphragm compressors play a key role: they enable oil-free , particle-free and hermetically sealed gas compression, which is essential for critical production processes.

Precise gas supply for semiconductor production

In semiconductor production, high-purity process gases are required to control complex manufacturing processes such as chemical vapour deposition (CVD) or physical vapour deposition (PVD). These processes require a precisely metered supply of speciality gases such as silanes, nitrogen, argon and other process gases in order to produce the desired material layers on wafers. The diaphragm compressors from sera HYDROGEN guarantee contamination-free gas compression, which ensures consistently high quality in production.

CO₂ liquefaction for cleaning processes

Another important area of application is the liquefaction of CO₂, which is used in the semiconductor industry to clean wafers and for surface treatment. In order for CO₂ to be utilised efficiently in liquid form, a precise increase in pressure is required. The diaphragm compressors from sera HYDROGEN reliably compress CO₂ to the required pressure without introducing impurities - a decisive factor for the quality and purity of semiconductor production.

Maximum safety and process stability

Thanks to their hermetic tightness, oil-free operation and precise pressure control, sera HYDROGEN compressors make a significant contribution to process reliability and quality assurance in semiconductor production. They enable contamination-free gas compression for demanding production environments and thus support the development of innovative semiconductor technologies.

With our experience in gas compression, we offer customised solutions for the semiconductor industry - for precise, safe and sustainable production.