Semiconductor industry – Gas compression for applications with high purity requirements
The semiconductor industry places high demands on gas purity, leak-tightness and process stability. Even minute levels of contamination can affect manufacturing processes. sera HYDROGEN metal-diaphragm compressors are used wherever process gases need to be compressed oil-free and under defined conditions.
Process gases for semiconductor manufacturing
High-purity process gases are used in processes such as chemical vapour deposition (CVD) or physical vapour deposition (PVD). sera HYDROGEN diaphragm compressors compress gases such as silane, nitrogen or argon in an oil-free manner and without any contact between the lubricant and the process gas. This makes them suitable for applications with high demands on gas purity and reproducible process conditions.
CO₂ compression for cleaning processes
Precise pressure increase is also crucial for CO₂ compression in cleaning and surface treatment processes. sera HYDROGEN compressors enable compression to the required pressure ranges and are suitable for applications with high demands on purity and process control.
Designed for demanding production environments
The hermetically sealed design, oil-free gas compression and precise pressure control support applications with high demands on operational safety and process stability. This makes the systems suitable for a variety of tasks in semiconductor manufacturing.
With many years’ experience in high-pressure compression, sera HYDROGEN develops compressor solutions for applications with high demands on gas purity, leak-tightness and process reliability.
Our advantages
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Innovation and technology
Technologies for precise, safe and reliable process operations.
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Customised solutions
Tailored to your processes, media and technical requirements.
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Engineering expertise
From design to commissioning – everything from a single source.
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Personalised support
Personalised support from the planning stage right through to the operation of your plant.
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Partnership and cooperation
Together, we develop solutions for your specific process requirements.
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Energy efficiency
Our systems promote efficient energy use and low operating costs.
