Safe and precise fluorine compression for the semiconductor and plastics industry
In the semiconductor industry, metal diaphragm compressors play a crucial role in cleaning processes. Due to the extremely high chemical reactivity of fluorine, this gas reliably binds all impurities in production chambers so that they can subsequently be flushed out.
Our compressors also ensure the precise supply of the required quantity of gas in the desired concentration in the surface finishing of plastics through fluorination. Despite the high reactivity of fluorine, our specially developed compression technology enables safe and controlled handling. The use of perfluoropolyether fluids and polished, gas-contact surfaces minimises the risk of fluorine fire to a manageable level.
In addition, the hermetic sealing of our metal diaphragm compressors ensures that no fluorine gas escapes into the environment and that the gas remains protected from contamination by atmospheric oxygen. The metal diaphragm compressors from sera HYDROGEN therefore offer a reliable, emission-free and safe solution for demanding applications in the semiconductor and plastics industries.
Advantages
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Precision
Diaphragm compressors supply precisely metered quantities of fluorine gas.
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Security
Special measures minimise the risk of a fluorine fire.
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Gas purity
No contamination of the fluorine gas by penetrating atmospheric oxygen.
